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"Springon™ High-Throughput Indexing Sputter Patented Moving Plasma Sputter Coater for Cylinder & Flat Parts"

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$600,000-1,000,000
Minimum order quantity: 1 set

model number

ES420

Key attributes

voltage

380V AC 3 PHASE+GND

machine type

SPRINGON ES420

coating

Vacuum Coating

Filter Type

-

warranty

1 Year

type

Coating Production Line

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Key attributes

voltage
380V AC 3 PHASE+GND
machine type
SPRINGON ES420
coating
Vacuum Coating
Filter Type
-
warranty
1 Year
type
Coating Production Line
power(w)
120KW
place of origin
TAIWAN
weight (kg)
6000
brand name
MEGAENERGY
dimension(l*w*h)
4.5m x 3m x 1.4m
substrate Size
660*600mm
Process chamber
3
Sputtering Power
20kW
Uniformity(%)
+-5%~15%(depend on substrate size)
Sputtering rate(Y2O3)
Max 12.5nm/s
Ultimate vacuum
<8e-6mbar
Target utilization/lifetime
>30%/1000 cycles

Packaging and delivery

Selling Units
Single item
Single volume
0 cm³
Single gross weight
0.0 kg

Lead time

Product descriptions from the supplier