MEGA ENERGY VACUUM CO., LTD.

TW1 yr

≥100%

On-time dispatch rate

" High Throughput Rotary System for Thick & Multi-layer Films | Easy Automation Integration"

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$470,000-820,000

Minimum order quantity: 1 set

model number

EL220

Key attributes

voltage

380V AC 3 PHASE+GND

machine type

SPRINGON EL220

coating

Vacuum Coating

Filter Type

-

warranty

1 Year

type

Coating Production Line

Shipping

Shipping fee and delivery date to be negotiated. Chat with supplier now for more details.

Payment & financing

4 interest-free payments with

Key attributes

voltage

380V AC 3 PHASE+GND

machine type

SPRINGON EL220

coating

Vacuum Coating

Filter Type

-

warranty

1 Year

type

Coating Production Line

power(w)

80KW

place of origin

TAIWAN

weight (kg)

5000

brand name

MEGAENERGY

dimension(l*w*h)

4m x 2.5m x 1.4m

substrate Size

660*600mm

Process chamber

1

Sputtering Power

20kW

Uniformity(%)

+-5%~15%(depend on substrate size)

Sputtering rate(Y2O3)

Max 12.5nm/s

Ultimate vacuum

<8e-6mbar

Target utilization/lifetime

>30%/1000 cycles

Packaging and delivery

Selling Units

Single item

Single volume

0 cm³

Single gross weight

0.0 kg

Lead time

Product descriptions from the supplier